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Diffusion coefficient of selenium in indium antimonide

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Diffusion coefficient of selenium in indium antimonide

Auteurs : RBID : ISTEX:11182_1992_Article_BF00895474.pdf

Abstract

The diffusion of selenium in indium antimonide has been studied in the temperature range 400–490°C, by the method of removing layers. Two regions have been distinguished in the donor distribution profiles. The first has a low diffusion coefficient and a high surface concentration, near to the limit of solubility of selenium (∼8·1018 cm−3). In the second region, a much larger diffusion coefficient and a surface concentration lower by two orders of magnitude (∼8·1016 cm−3) with weak temperature dependence are found. The temperature dependences of the diffusion coefficients of the first and second regions can be described by the expressions: D=4.8·1013 exp(−4.1 eV/kT) cm2/sec, D2=1.9·1013 exp(−3.9 eV/kT) cm2/sec.

DOI: 10.1007/BF00895474

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<div type="abstract" xml:lang="eng">The diffusion of selenium in indium antimonide has been studied in the temperature range 400–490°C, by the method of removing layers. Two regions have been distinguished in the donor distribution profiles. The first has a low diffusion coefficient and a high surface concentration, near to the limit of solubility of selenium (∼8·1018 cm−3). In the second region, a much larger diffusion coefficient and a surface concentration lower by two orders of magnitude (∼8·1016 cm−3) with weak temperature dependence are found. The temperature dependences of the diffusion coefficients of the first and second regions can be described by the expressions: D=4.8·1013 exp(−4.1 eV/kT) cm2/sec, D2=1.9·1013 exp(−3.9 eV/kT) cm2/sec.</div>
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<abstract lang="eng">The diffusion of selenium in indium antimonide has been studied in the temperature range 400–490°C, by the method of removing layers. Two regions have been distinguished in the donor distribution profiles. The first has a low diffusion coefficient and a high surface concentration, near to the limit of solubility of selenium (∼8·1018 cm−3). In the second region, a much larger diffusion coefficient and a surface concentration lower by two orders of magnitude (∼8·1016 cm−3) with weak temperature dependence are found. The temperature dependences of the diffusion coefficients of the first and second regions can be described by the expressions: D=4.8·1013 exp(−4.1 eV/kT) cm2/sec, D2=1.9·1013 exp(−3.9 eV/kT) cm2/sec.</abstract>
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